Alongside increasingly advanced manufacturing processes, the semiconductor and display industries must reliably manage a wide range of emissions including greenhouse gases, VOCs and NOx.
Heesung Catalysts helps create a cleaner, more stable manufacturing environment through catalyst technologies that reduce greenhouse gases and process emissions, as well as related technologies and materials, including gas purification technologies and PGC plating materials.
More advanced processes call for more precise environmental management
Semiconductor and display manufacturing generates different emissions at each stage, including etching, deposition, cleaning, and coating and drying. The more diverse the process gases and operating conditions become, the more important it is to accurately understand emission characteristics such as greenhouse gases, VOCs and NOx, and to apply treatment technology suited to each process.
In particular, PFCs, NF₃ and N₂O used in semiconductor manufacturing are key targets for greenhouse gas management, and stable production and product quality also require attention to process gas purification and material quality.
Reducing greenhouse gases such as PFCs, NF₃ and N₂O from semiconductor manufacturing
Managing VOCs and process emissions from display processes such as coating and drying
Ensuring consistent purification and quality of gases used in manufacturing processes
Reliable application of catalyst and material technologies for advanced manufacturing processes
Catalyst solutions for advanced manufacturing environments
Climate Response Solutions
Reaction Process Solutions
Related Products
Greenhouse Gas Abatement Catalysts
Applied to reliably treat greenhouse gases such as PFCs, NF₃ and N₂O generated in semiconductor manufacturing. Heesung Catalysts supports high decomposition performance and stable long-term operation with catalyst technology tailored to process gas composition, temperature and operating conditions.
VOC Oxidation Catalysts
Used to reduce VOCs generated during the coating and drying stages of display and other manufacturing processes. Catalyst technology suited to each process’s emission characteristics and operating temperature enables stable oxidation performance and reliable emissions management.
Gas Purification Catalysts
Applied to remove impurities from gases used in semiconductor and display manufacturing, improving process stability and product quality. Purification technology designed for the required gas composition and purity supports reliable operation of downstream processes.
PGC Plating Materials
Precious metal-based materials used in the plating of semiconductor substrates and related components. Heesung Catalysts’ PGC plating materials address a variety of production and processing conditions, helping ensure consistent plating quality and stable manufacturing processes.
